3200 Thiết bị kiểm soát lưu lượng  Kofloc Vietnam ANSdanang


Flow range (N2 equivalent,
20℃/1 atm)
1 SCCM–20 SLM (The conditions are freely selectable)
Sensor Thermal mass flow sensor
Valve type Proportional solenoid valve (closed when not energized)
Control range 2–100% (F.S.)
Response 1 sec. or less (0–100% within ±2% typical)
Accuracy ±1% F.S. (Accuracy guaranteed at 15–35℃)
Repeatability ±0.2%F.S.
Operating differential
F.S. ≤ 5 SLM: 50–300 kPa (G)
F.S.> 5 SLM: 100–300 kPa (G)
Option: Low differential pressure (LP) specification is available depending on conditions.
Allowable operating pressure 300 kPa (G) or less
Proof pressure 980 kPa (G)
Leak rate 1 × 10-8 Pa·m3/s or less (excluding permeation of He)
Allowable ambient
Allowable ambient humidity 10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316L
Diaphragm: SUS316
Valve seat: FKM (option: CR, NBR or perfluor)
Sealing: FKM (option: CR, NBR or perfluor)
Electric connection Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals 0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals 0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore) Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.
Weight Approx. 1000 g