Mr. Bảo3200 Thiết bị kiểm soát lưu lượng Kofloc Vietnam ANSdanang
| Flow range (N2 equivalent, 20℃/1 atm) |
1 SCCM–20 SLM (The conditions are freely selectable) |
| Sensor | Thermal mass flow sensor |
| Valve type | Proportional solenoid valve (closed when not energized) |
| Control range | 2–100% (F.S.) |
| Response | 1 sec. or less (0–100% within ±2% typical) |
| Accuracy | ±1% F.S. (Accuracy guaranteed at 15–35℃) |
| Repeatability | ±0.2%F.S. |
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa (G) |
| F.S.> 5 SLM: 100–300 kPa (G) | |
| Option: Low differential pressure (LP) specification is available depending on conditions. | |
| Allowable operating pressure | 300 kPa (G) or less |
| Proof pressure | 980 kPa (G) |
| Leak rate | 1 × 10-8 Pa·m3/s or less (excluding permeation of He) |
| Allowable ambient temperature |
0–50℃ |
| Allowable ambient humidity | 10–90% (No condensation allowed) |
| Materials of parts in contact with gases |
Body: SUS316L |
| Diaphragm: SUS316 | |
| Valve seat: FKM (option: CR, NBR or perfluor) | |
| Sealing: FKM (option: CR, NBR or perfluor) | |
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) |
| Required power supply | +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
| Joint (Main unit bore) | Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
| Weight | Approx. 1000 g |
