Cảm biến lưu lượng_FG-110C Series

Flow range, based on N₂
(intermediate ranges available)

min. 0,014…0,7 ml_n/min
max. 0,18…9 ml_n/min

Accuracy (incl. linearity)
(based on actual calibration)

standard: ±0,5% Rd plus ±0,1%FS
(±0,8% Rd plus ±0,2% FS for ranges 3...5 mln/min;
±1% Rd plus ±1% FS for ranges < 3 mln/min)

Repeatability

< 0,2% Rd

Turndown

1 : 150; in analog mode 1 : 50

Multi Gas / Multi Range

embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases.
MG/MR functionality available up to 100 bar.

Operating temperature

-10…70°C

Temperature sensitivity

zero: < 0,02% FS/°C; span: < 0,025% Rd/°C

Pressure sensitivity

< 0,15% Rd/bar typical N₂;
< 0,02% Rd/bar N₂ (incl. pressure correction option)

Leak integrity, outboard

tested < 2 x 10^-9 mbar l/s He

Attitude sensitivity

max. error at 90º off horizontal 0,07% FS at 1 bar, typical N₂

Warm-up time

30 min. for optimum accuracy