Standaid Mass Flow Meter MODEL3760 SERIES
Xuất sứ: JAPAN
Nhà cung cấp: ANS- ANH NGHI SƠN ĐÀ NẴNG
Hãng sản xuất: KOFLOC VIET NAM
Ứng dụng sản phẩm: Automotive
Hotline
anhnghisonhcm* Thông số
| Model | 3760 | 3765 |
| Flow range (N2 equivalent, 20℃/1atm) | 10 SCCM–20 SLM (freely selectable) |
30 SLM–100 SLM (freely selectable) |
| Sensor | Thermal mass flow sensor | |
| Response | 2 sec. or less | 3 sec. or less |
| Accuracy | ±1.0%F.S. (25℃) | ±1.5%F.S. (25℃) |
| Temperature coefficient | ±0.1 F.S./℃ (15–35℃) | ±0.2 F.S./℃ (15–35℃) |
| Repeatability | ±0.5%F.S. (20℃) | |
| Proof pressure | 980kPa (G) | |
| Leak rate | 1 × 10-8 Pa·m3/s or less (excluding permeation of He) | |
| Allowable ambient temperature | 5–45℃ | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in contact with gases |
Body: SUS316 | |
| Sealing: FKM (option: CR or NBR) | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) | |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) | |
| Required power supply | +15VDC (±5%) 100mA, −15VDC (±5%)100mA | |
| Joint (Main unit bore) | Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3 |
