Mr. Bảo5400 Thiết bị kiểm soát lưu lượng Kofloc Vietnam ANSdanang
| Model | 5400 | 5410 |
| Flow range (N2 equivalent, 20℃/1 atm) |
10 SCCM–20 SLM (freely selectable) | 10 SCCM–20 SLM (freely selectable) |
| Sensor | Thermal mass flow sensor | |
| Valve type | Proportional solenoid valve (closed when not energized) | − |
| Control range | 2–100% (F.S.) | − |
| Response | 1 sec. or less (0–100% within ±2% typical) | − |
| Accuracy | ±1% F.S. (20℃) | |
| Repeatability | Within ±0.2% F.S. (20℃) | |
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa | − |
| F.S.> 5 SLM: 100–300 kPa | − | |
| Allowable operating pressure | 300 kPa (G) or less | |
| Proof pressure | 980 kPa (G) | |
| Leak rate | 1 × 10-11 Pa·m3/s or less | |
| Allowable ambient temperature | 0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃) | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in contact with gases |
Body: SUS316L | |
| Diaphragm: Ni-Co | ||
| Valve seat: PTFE | ||
| Sealing: SUS316L, Ni | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) | |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) | − |
| Flow rate output signals | 0–5 VDC (Minimum load resistance: 250 kΩ or more) | |
| Required power supply | +15 VDC (±5%) 100 mA, −15VDC (±5%) 200mA |
+15 VDC (±5%) 100 mA, −15VDC (±5%) 100mA |
| Joint (Main unit bore) | Standard: 1/4 VCR equivalent Option: 1/4 SWL | |
| Weight | Approx. 1000 g | Approx. 800 g |
