EX-250SC Thiết bị đo lưu lượng Kofloc Vietnam ANSdanang

Model Mass Flow Controller Mass Flow Meter  
EX-250SC EX-250SM  
Sensor type Thermal sensor  
Valve type Normally closed proportional solenoid valve -  
Applicable gases(*1) N2、Air、H2、He、Ar、O2、CO2 etc.  
(Gases not specifically mentioned here are subject to calibration for N2 equivalent.)  
Flow range(*2) 10SCCM ~ 5SLM  
Control(measure)range 2 ~ 100%(F.S.)  
Response ≤ 1sec (within ± 2%F.S.)(*8)  
Accuracy(*3) ± 1.0%F.S.  
Repeatability ± 0.2%F.S.  
Operating differential pressure(*4) 50 ~ 300kPa(Ar、CO2:100kPa ~ 300kPa) -  
Inlet maximum pressure 500kPa(G)  
Proof pressure 980kPa(G)  
External leak rate(He) ≤ 1.0 × 10-8Pa・m3/sec   
Temperature Working temp. 5 ~ 50℃  
Accuracy guaranteed temp. 15 ~ 35℃  
Allowable storage temp. -10 ~ 60℃  
Allowable operating humidity 10 ~ 90%RH (without dew condensation)  
Materials of gas contact part SUS316, SUS316L, magnetic stainless steel(*5), PTFE, FKM  
Electrical connection Dsub 9pin KFC Standard(SEMI standard compliant)  
Flow rate setting signal 0~5VDC(input impedance: approx. 1M Ω) -  
or 4~20mA(input impedance: approx. 250 Ω)  
Flow rate output signal 0 ~ 5VDC( load resistance ≧10k Ω)  
or 4 ~ 20mA( load resistance ≧500 Ω)  
Digital communication RS485 rotary-switch address setting  
Required power supply (DC) +15VDC( ± 5%)100mA , -15VDC(± 5%)150mA   
or +24VDC(± 10%) ≤180mA  (MFM would be ≤100mA)  
Joint(*6) 1/4F900(standard)  
Mounting posture Horizontal installation recommended.  
Weight(*7) Approx.500g Approx.440g  
(*1) The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.  
(*2) The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
(*3) Accuracy for calibration gas: N2, flow range (max. full scale).    
(*4) The operating differential pressure may differ depending on specifications.    
(*5) Mass flow meter does not contain magnetic stainless steel.    
(*6) Contact us for any other joints.      
(*7) Exclusive of weight of joint.      
(*8) Pressure condition would be needed when you order.