5400-thiet-bi-kiem-soat-luu-luong-kofloc.png

5400 Thiết bị kiểm soát lưu lượng  Kofloc Vietnam ANSdanang

Model 5400 5410
Flow range (N2 equivalent,
20℃/1 atm)
10 SCCM–20 SLM (freely selectable) 10 SCCM–20 SLM (freely  selectable)
Sensor Thermal mass flow sensor
Valve type Proportional solenoid valve (closed when not energized)
Control range 2–100% (F.S.)
Response 1 sec. or less (0–100% within ±2% typical)
Accuracy ±1% F.S. (20℃)
Repeatability Within ±0.2% F.S. (20℃)
Operating differential
pressure
F.S. ≤ 5 SLM: 50–300 kPa
F.S.> 5 SLM: 100–300 kPa
Allowable operating pressure 300 kPa (G) or less
Proof pressure 980 kPa (G)
Leak rate 1 × 10-11 Pa·m3/s or less
Allowable ambient temperature 0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃)
Allowable ambient humidity 10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316L
Diaphragm: Ni-Co
Valve seat: PTFE
Sealing: SUS316L, Ni
Electric connection Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals 0–5 VDC (Input impedance: 1 MΩ or more) 
Flow rate output signals 0–5 VDC (Minimum load resistance: 250 kΩ or more)
Required power supply +15 VDC (±5%) 100 mA,
−15VDC (±5%) 200mA
+15 VDC (±5%) 100 mA,
−15VDC (±5%) 100mA
Joint (Main unit bore) Standard: 1/4 VCR equivalent Option: 1/4 SWL
Weight Approx. 1000 g Approx. 800 g