DF-300C Thiết bị kiểm soát lưu lượng  Kofloc Vietnam ANSdanang


Sensor type Thermal sensor
Valve type Normally closed proportional solenoid valve
Applicable gases*1 N2 (Air, H2, He, Ar, O2, CO2)*2
Flow range*3 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2
Control range 2 to 100% (F.S.)
Response*4 Total flow rate control range ±1 sec (within ±2% F.S.)
Accuracy*5 ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
Repeatability ±0.25% F.S.
Operating differential pressure*6 50 to 300 kPa (100 to 300 kPa for Ar and CO2)
Inlet maximum pressure 500kPa(G)
Proof pressure 980kPa(G)
External leak rate ≤1.0 x 10-8 Pa·m3/sec (He)
Temperature Working temp. 5 to 50℃
Accuracy guaranteed temp. 15 to 35℃
Allowable storage temp. -10 to 60℃
Permissible ambient humidity
Allowable operating humidity
10 to 90% RH (without dew condensation)
Materials of gas contact part SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM
Electrical connection D-sub 15-pin male, high density, HR-10A (two)
Flow rate setting signal 0 to 5 V DC (input impedance: approx. 1 MΩ), or 4 to 20 mA (input impedance: approx. 250 Ω)
Flow rate output signal 0 to 5 V DC (load resistance 10 kΩ), or 4 to 20 mA (load resistance ≤ 500 Ω)
Digital communication Address setting with RS485 rotary switch or indicator: up to 99 devices (9600 bps)
Event input Three contact inputs (non-insulated)
Event output Three NPN open collectors (non-insulated, max. rating 35 V, 50 mA)
Required power supply (DC) +24 V DC (±10%), 300 mA max. (DC jack, D-sub)
Joint*7 1/4 F900 (standard), 1/4 UJR, Rc 1/4
Mounting posture Horizontal installation recommended.
Weight*8 Approx. 950 g
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the
specified full scale.
*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*4 Guarantee for calibration gas: N2.
*5 Accuracy for calibration gas: N2, flow range (max. full scale).
*6 The operating differential pressure may differ depending on specifications.
*7 Contact us for any other joints.
*8 Exclusive of weight of joint.